Coherent Fourier Scatterometry for the fast and sensitive detection of subwavelength structures and particles


Summary

We investigate and optimize new techniques to detect nanostructures and nano-particles in semiconductor, and plastic-based fabrication technologies. The technique should be fast, operate in-line and applicable to large areas. Since the structures are too small to be imaged, a technique called scatterometry is implemented.


Research description

We propose to boost the sensitivity of nanoparticle detection using Coherent Fourier scatterometry by  optimizing the illumination mode in conjunction with optimized detection schemes. With currently available spatial light modulators and deformable mirrors, the amplitude, phase and polarisation of the optimum optical fields can be shaped  to achieve a focused field that will give maximum sensitivity for particle detection. Furthermore, we will optimize the detection system to retrieve the essential information at high speed and to suppress the influence of the noise in the system maximally. Finally, since in many applications it is important to probe larger areas up to a few square centimetres in a few minutes, we work on designing a parallelized version of the nanoparticle detector.


Keywords

Projects.

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Determination of subwavelength parameters of nanostructures using far field detection

Determination of side wall angle of nanostructures ...

project

Determination of subwavelength parameters of nanostructures using far field detection

Lossless Photon management‚Optical design for manufacture at different length scales

Optical study and application of spatial light modulator (SLM) ...

project

Lossless Photon management‚Optical design for manufacture at different length scales

Coherent Fourier Scatterometry for the fast and sensitive detection of subwavelength structures and particles

...

project

Coherent Fourier Scatterometry for the fast and sensitive detection of subwavelength structures and particles

Phase Retrieval Imaging

Ptychography with partially coherent illumination ...

project

Phase Retrieval Imaging

Nano-optics for Metrology

Measurements at scales much smaller than the wavelength of light ...

project - Measurements at scales much smaller than the wavelength of light

Nano-optics for Metrology

News.

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Beijing Institute of Space Mechanics and Electricity

A delegation of  50 people from BISME (Bejing Institute of Space Mechanics and Electricity) has visited the Optics Group. The delegation was in  the Netherlands to attend the 6th International Symposium ...

News - October 7, 2019

Beijing Institute of Space Mechanics and Electricity

Weekend of Science – Oct 5-6, 2019

The Weekend of Science is a national science weekend. Every year, various technical institutions open their doors to provide extra activities. This year the theme of our Weekend of Science is: LIGHT. Date ...

News - September 25, 2019

Weekend of Science – Oct 5-6, 2019

Face2Phase – Oct 21-23, 2019

The conference Fase2Phase, 2nd Edition, addresses imaging with phase information and covers topics such as lensless imaging, aberration retrieval, adaptive and active optics, ptychography, holography, tomography, phase retrieval and applications. Date : 21 ...

News - September 10, 2019

Face2Phase – Oct 21-23, 2019