Omar El Gawhary

Main topics of research
Nanometrology by optical methods, superresolution, computational optics, topological information and its application in scattering problems.

Short CV
Laureaa degree in Electronics Engineering (Quantum Electronics) from “La Sapienza” University in Rome (Italy) (110/110 cum laude) (2000).

Industrial experience from 2000 until 2007 (telecom sector as well as public Institutions, Italy).

PhD in Physics (Optics, 2003-2007), from Roma Tre University in Rome (2007).

From 2008 to 2012 Post doctoral position at the Optics group of TU Delft. Research performed in strict collaboration with ASML.

From 2011-2020 principal scientist at VSL, the National Metrology Institute of the Netherlands (situated in Delft). Responsible of the absolute radiometry lab and initiator of optical nanometrology research lab at VSL (single wavelelength and hyperspectral optical scatterometry, ptychography etc.).

From 2020: Principal scientist at ASML Research.

From Sep 2017 – part-time Associate Professor at Delft University of Technology, ImPhys Depart, Optics Group.


Omar El Gawhary - associate-professor

Optical metrology and superresolution

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