Projects

The Optics Research Group is coordinating two TTW Perspective Programmes, namely Linx and SYNOPTICS.

All Optics Research Group projects.

Lensless imaging with EUV and Soft X-Rays (LINX)

LINX is a NWO-TTW perspective programme with the aim to apply various lensless imaging techniques, from ptychography to scatterometry, while using wavelengths in the EUV and Soft X-Ray regime. This programme is ...

project

Lensless imaging with EUV and Soft X-Rays (LINX)

Leading by Light Guidance

Optical coherence; optimal delivery and positioning (OPTIC) The newest generation of optical sensors and light sources must be able to conduct many colours of light from source to destination. The OPTIC programme develops ...

project

Leading by Light Guidance

SYNOPTICS

SYNOPTICS is a research programme running from 2020-2025 with the aim to use all properties of light (amplitude, phase, polarization and wavelength) to achieve ultimate performance in imaging and sensing in diverse ...

project

SYNOPTICS

High performance single-photon detectors

Single-photon detection, what is the limit? ...

project

High performance single-photon detectors

SEQUOIA Project

SENSING USING QUANTUM OCT WITH AI ...

project

SEQUOIA Project

Extreme UV and Soft X-Ray metrology

Continuous progress in the semi-conductor industry are leading to smaller, faster and more energy efficient chips for our modern society. Critical parameters for this industry, such as overlay and critical dimension (CD), ...

project

Extreme UV and Soft X-Ray metrology

Detection for space

Research about detection for space. The team has been working with four research themes, which resulted in four projects. ...

project

Detection for space

Graded Index optics

Recent progress in the making of media with a variable refractive index has the potential to change lens design significantly. With these new materials, curved light rays are used to make high-quality ...

project

Graded Index optics

Advanced Traceable Metrology for Optical Constants (ATMOC)

Understanding the size-dependent properties of various material ultra-thin films for integrated circuits is critical for nanotechnology innovation. Photonic measurement methods in the soft-X ray to IR wavelength range that approach theoretical limits ...

project

Advanced Traceable Metrology for Optical Constants (ATMOC)

Nano-optics for Metrology

We use the concepts from nano-optics, mainly directional scattering to develop techniques that can be used in high precision metrology such as transverse displacement sensing. ...

project

Nano-optics for Metrology

Far field nanoparticle detection

We investigate and optimize new techniques to detect nanostructures and nano-particles in semiconductor, and plastic-based fabrication technologies. The technique should be fast, operate in-line and applicable to large areas. Since the structures ...

project

Far field nanoparticle detection

Inverse electromagnetics for EUV mask metrology and inspection

Extreme ultra violet (EUV) lithography is at the high volume manufacturing threshold. It is therefore important to address relevant technical and technological challenges on its roadmap. One of the crucial concerns is ...

project

Inverse electromagnetics for EUV mask metrology and inspection

Metamaterials and metasurfaces

In recent years, metasurfaces (MSs), as planar version of metamaterials, have demonstrated strong capabilities to control EM waves, generating many fascinating effects such as ultrathin lenses, planar holograms, photonic spin Hall effects ...

project

Metamaterials and metasurfaces

Free Form Scattering Optics

The Free-Form Scattering Optics program is a joint initiative where three Universities of The Netherlands (TUDelft, University of Twente, TU Eindhoven) work together to enable high-tech optical devices that contribute to energy efficacy, climate ...

project

Free Form Scattering Optics