Wim Coene

Wim M. J. Coene received the PhD degree in physics from the University of Antwerp in 1986, for his research on computational modeling of high-energy electron diffraction and image formation in a high-resolution transmission electron microscope (TEM).

He joined the Philips Research Laboratories in Eindhoven in 1988, where he worked on phase-retrieval methods in high-resolution TEM devised for digital correction of electron-optical aberrations (Brite-EURAM Program). In 1996, he started to work on channel coding and signal processing for bit detection in optical storage; this research was directed on Blu-Ray disc technology, and on future generations of optical storage like near-field recording and 2D optical storage (European TwoDOS Program).
He joined ASML Netherlands B.V. in Veldhoven in 2007, where he is currently Director of Research.
Since 2015, he is also part-time Professor at the Optics group of the Delft University of Technology.

In the recent years of his combined assignment at TU-Delft and ASML, his scientific interests have been focused on optical metrology of nanostructures as manufactured by nanolithography in the semiconductor industry, with a focus on computational imaging, lensless imaging, inverse problems and phase retrieval.  In 2017-2018, he has initiated and shaped a NWO-TTW Perspective Program with 5 academic groups in the Netherlands, on Lensless Imaging of 3D Nanostructures with Soft X-Rays (LINX). Within this LINX Program, an EUV beamline has been designed and constructed at TU-Delft, for which new algorithmic concepts of lensless imaging has been devised in order to image nanostructures in future generation of chips from a number of far-field diffraction patterns.

In 2022, a new and strong focus in his research has been directed to the digital correction of non-isoplanatic (4D) aberrations in the case of coherent imaging like in off-axis holographic microscopy (with a recent presentation at the MathMet-2022 Conference, Nov. 2-4 Paris).


Wim Coene - professor