Far field nanoparticle detection

Project

Coherent Fourier Scatterometry for the fast and sensitive detection of subwavelength structures and particles

We investigate and optimize new techniques to detect nanostructures and nano-particles in semiconductor, and plastic-based fabrication technologies. The technique should be fast, operate in-line and applicable to large areas. Since the structures are too small to be imaged, a technique called scatterometry is implemented.


Objective

Important question appears with regard to the problem of contamination detection and improved performance of the systems used for quality inspection of ICs. What is the realistic detection limit of our light-field scattering-based technique for the detection of low-contrast nanoparticles on top of substrates used in the semiconductor industry?

We propose to improve the sensitivity and resolution of scatterometry by utilizing an optimized focused illumination in combination with improved detection schemes, all depending on the sample being inspected. With currently available modern optoelectronic spatial light modulators and deformable mirrors, the amplitude, phase and polarization of the optimal optical fields in the entrance pupil of the focusing objective can be position-dependently shaped to obtain a focused field that gives maximum sensitivity to the nominal structure parameters. In addition, we can refine the detector system to collect critical information at high speed and to minimize the effect of noise on the machine.  Finally, as it is necessary to test wider areas up to a few cm2 in a few minutes in several applications, we will develop a parallelized version of the optimized illumination and detection systems for this reason.


Impact

We make a positive impact on every level of society.  Think of more economical healthcare systems, energy-efficient transportation systems, more affordable education to everyone.  We achieve this by positively influencing the process of IC’s manufacturing which, in its turn, via microchips size reduction makes possible better living.


Publications

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Projects.

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Advanced Traceable Metrology for Optical Constants (ATMOC)

Understanding the size-dependent properties of various material ultra-thin films for integrated circuits is critical for nanotechnology innovation. Photonic measurement methods in the soft-X ray to IR wavelength range that approach theoretical limits ...

project

Advanced Traceable Metrology for Optical Constants (ATMOC)

SEQUOIA Project

SENSING USING QUANTUM OCT WITH AI ...

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SEQUOIA Project

Extreme UV and Soft X-Ray metrology

Continuous progress in the semi-conductor industry are leading to smaller, faster and more energy efficient chips for our modern society. Critical parameters for this industry, such as overlay and critical dimension (CD), ...

project

Extreme UV and Soft X-Ray metrology

Far field nanoparticle detection

We investigate and optimize new techniques to detect nanostructures and nano-particles in semiconductor, and plastic-based fabrication technologies. The technique should be fast, operate in-line and applicable to large areas. Since the structures ...

project

Far field nanoparticle detection

Lensless imaging with EUV and Soft X-Rays (LINX)

LINX is a NWO-TTW perspective programme with the aim to apply various lensless imaging techniques, from ptychography to scatterometry, while using wavelengths in the EUV and Soft X-Ray regime. This programme is ...

project

Lensless imaging with EUV and Soft X-Rays (LINX)

News.

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Soft X-Ray source based on HHG for LINX project

The Optics Research Group recently installed a coherent Soft X-Ray source based on High Harmonic Generation. This new source will have an important role within the LINX consortium, where innovative techniques for ...

News - October 15, 2020

Soft X-Ray source based on HHG for LINX project

Beijing Institute of Space Mechanics and Electricity

A delegation of  50 people from BISME (Bejing Institute of Space Mechanics and Electricity) has visited the Optics Group. The delegation was in  the Netherlands to attend the 6th International Symposium ...

News - October 7, 2019

Beijing Institute of Space Mechanics and Electricity

Weekend of Science – Oct 5-6, 2019

The Weekend of Science is a national science weekend. Every year, various technical institutions open their doors to provide extra activities. This year the theme of our Weekend of Science is: LIGHT. Date ...

News - September 25, 2019

Weekend of Science – Oct 5-6, 2019

Face2Phase – Oct 21-23, 2019

The conference Fase2Phase, 2nd Edition, addresses imaging with phase information and covers topics such as lensless imaging, aberration retrieval, adaptive and active optics, ptychography, holography, tomography, phase retrieval and applications. Date : 21 ...

News - September 10, 2019

Face2Phase – Oct 21-23, 2019