Extreme UV and Soft X-Ray metrology
Project
Continuous progress in the semi-conductor industry are leading to smaller, faster and more energy efficient chips for our modern society. Critical parameters for this industry, such as overlay and critical dimension (CD), can go down to a few nanometers. To follow this trend, there is a need for high-resolution metrology in order to inspect these small structures. Short wavelength metrology in the Extreme UV (EUV) and Soft X-Ray (SXR) regime can help us to get there.
The Optics Research Group performs research on various metrology methods using these short wavelengths, with the main focus on lensless imaging. With a high-flux high harmonic generation source to our disposal we are able to inspect high-end semiconductor chips using methods like ptychography.
Objective
Impact
Keywords
Target Groups
Semiconductor Industry, Surface and Material Analyse Industry
Information
- Wim Coene
- Yifeng Shao
- Sven Weerdenburg
- Sander Senhorst
Projects.
View all on the projectspage.Extreme UV and Soft X-Ray metrology
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LINX is a NWO-TTW perspective programme with the aim to apply various lensless imaging techniques, from ptychography to scatterometry, while using wavelengths in the EUV and Soft X-Ray regime. This programme is ...
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Lensless imaging with EUV and Soft X-Rays (LINX)News.
Related to the topic at hand.SLIM funding for TUD, The Hague University of Applied Sciences, LIS and TNO for the Bedrijfsschool Optica
The Dutch Optics Centre (DOC) has acquired funding in the SLIM framework of the Ministery of Social Affairs for starting the Bedrijfschool Optica. The Bedrijfsschool Optica will offer tailored education and training ...
News - October 15, 2020
SLIM funding for TUD, The Hague University of Applied Sciences, LIS and TNO for the Bedrijfsschool OpticaSoft X-Ray source based on HHG for LINX project
The Optics Research Group recently installed a coherent Soft X-Ray source based on High Harmonic Generation. This new source will have an important role within the LINX consortium, where innovative techniques for ...
News - October 15, 2020
Soft X-Ray source based on HHG for LINX projectThe Photonic Career Hub – CARLA
Photonics has been coined as a key enabling technology for the future. It is the physical science that focusses on all aspects of light – not only the visible light - and ...
News - July 2, 2020
The Photonic Career Hub – CARLABeijing Institute of Space Mechanics and Electricity
A delegation of 50 people from BISME (Bejing Institute of Space Mechanics and Electricity) has visited the Optics Group. The delegation was in the Netherlands to attend the 6th International Symposium ...
News - October 7, 2019
Beijing Institute of Space Mechanics and ElectricityWeekend of Science – Oct 5-6, 2019
The Weekend of Science is a national science weekend. Every year, various technical institutions open their doors to provide extra activities. This year the theme of our Weekend of Science is: LIGHT. Date ...
News - September 25, 2019
Weekend of Science – Oct 5-6, 2019Face2Phase – Oct 21-23, 2019
The conference Fase2Phase, 2nd Edition, addresses imaging with phase information and covers topics such as lensless imaging, aberration retrieval, adaptive and active optics, ptychography, holography, tomography, phase retrieval and applications. Date : 21 ...
News - September 10, 2019
Face2Phase – Oct 21-23, 2019