Nano-optics for Metrology

Project

We use the concepts from nano-optics, mainly directional scattering to develop techniques that can be used in high precision metrology such as transverse displacement sensing.


Objective

We combine fields of nano-optics and vectorial fields shaping to achieve a sensitive measurement of deep-subwavelength displacement.


Impact

Far field scheme to access nanoscale information has been a fascinating topic for super resolution imaging and ultrahigh precision optical metrology. In this research, with the use of absolute dark region of specific optical beams along with nanostructures, we propose a new far field detection method to measure nanoscale displacement.

By slightly displacing the nanostructure with respect to the absolute dark point or line of the incident beam, the detected signal in the far field can change dramatically. The resolution can be extremely high due to the infinitesimal size of the dark region.

In contrary to conventional methods using short wavelength for the detection, our method requires to use longer wavelength for better results because of the special interactions within the nanostructures. The present method could be implemented in the semiconductor industry to solve the crucial problem of overlay alignment; it would also shed new light on super resolution techniques for localization.


Publications

Keywords
Target Groups


Semiconductor Industry

Information

Projects.

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Far field nanoparticle detection

We investigate and optimize new techniques to detect nanostructures and nano-particles in semiconductor, and plastic-based fabrication technologies. The technique should be fast, operate in-line and applicable to large areas. Since the structures ...

project

Far field nanoparticle detection

LINX

LINX is a NWO-TTW perspective programme with the aim to apply various lensless imaging techniques, from ptychography to scatterometry, while using wavelengths in the EUV and Soft X-Ray regime. This programme is ...

project

LINX

Characterization of nanostructures using optical far field techniques

Determination of side wall angle of nanostructures ...

project

Characterization of nanostructures using optical far field techniques

Electromagnetic modeling of SLM

The spatial light modulator (SLM), especially liquid crystal on silicon (LCoS) type has multiple applications in optical systems, such as beam steering, beam shaping or computational holography. At the same time, there ...

project

Electromagnetic modeling of SLM

Phase Retrieval

The phase of a field is often more important than the amplitude. This is in particular true for focusing of light. To improve the quality of imaging it is often desirable to consider ...

project

Phase Retrieval

News.

Related to the topic at hand.

Soft X-Ray source based on HHG for LINX project

The Optics Research Group recently installed a coherent Soft X-Ray source based on High Harmonic Generation. This new source will have an important role within the LINX consortium, where innovative techniques for ...

News - October 15, 2020

Soft X-Ray source based on HHG for LINX project

Beijing Institute of Space Mechanics and Electricity

A delegation of  50 people from BISME (Bejing Institute of Space Mechanics and Electricity) has visited the Optics Group. The delegation was in  the Netherlands to attend the 6th International Symposium ...

News - October 7, 2019

Beijing Institute of Space Mechanics and Electricity

Weekend of Science – Oct 5-6, 2019

The Weekend of Science is a national science weekend. Every year, various technical institutions open their doors to provide extra activities. This year the theme of our Weekend of Science is: LIGHT. Date ...

News - September 25, 2019

Weekend of Science – Oct 5-6, 2019

Face2Phase – Oct 21-23, 2019

The conference Fase2Phase, 2nd Edition, addresses imaging with phase information and covers topics such as lensless imaging, aberration retrieval, adaptive and active optics, ptychography, holography, tomography, phase retrieval and applications. Date : 21 ...

News - September 10, 2019

Face2Phase – Oct 21-23, 2019